Invention Grant
- Patent Title: Semiconductor device with graphene conductive structure and method for forming the same
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Application No.: US16990676Application Date: 2020-08-11
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Publication No.: US11587828B2Publication Date: 2023-02-21
- Inventor: Ching-Cheng Chuang
- Applicant: NANYA TECHNOLOGY CORPORATION
- Applicant Address: TW New Taipei
- Assignee: NANYA TECHNOLOGY CORPORATION
- Current Assignee: NANYA TECHNOLOGY CORPORATION
- Current Assignee Address: TW New Taipei
- Agency: Muncy, Geissler, Olds & Lowe, P.C.
- Main IPC: H01L23/532
- IPC: H01L23/532 ; H01L21/768 ; H01L23/482

Abstract:
The present disclosure relates to a semiconductor device and a method for forming a semiconductor device with a graphene conductive structure. The semiconductor device includes a first gate structure disposed over a semiconductor substrate, and a first source/drain region disposed in the semiconductor substrate and adjacent to the first gate structure. The semiconductor device also includes a first silicide layer disposed in the semiconductor substrate and over the first source/drain region, and a graphene conductive structure disposed over the first silicide layer. The semiconductor device further includes a first dielectric layer covering the first gate structure, and a second dielectric layer disposed over the first dielectric layer. The graphene conductive structure is surrounded by the first dielectric layer and the second dielectric layer.
Information query
IPC分类: