- Patent Title: Grinding control method and device for wafer, and grinding device
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Application No.: US16584425Application Date: 2019-09-26
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Publication No.: US11587838B2Publication Date: 2023-02-21
- Inventor: Hongsheng Yi , Zhijun Zhang , Yifan Yang
- Applicant: Wuhan Xinxin Semiconductor Manufacturing Co., Ltd.
- Applicant Address: CN Hubei
- Assignee: Wuhan Xinxin Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Wuhan Xinxin Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: CN Hubei
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: CN201910690427.1 20190729
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/66 ; H01L21/02

Abstract:
A grinding control method and device for a wafer, and a grinding device are provided. A grinder is controlled to grind a mass production wafer with a set grinding parameter. In a case that it is determined to perform a test using a test wafer, the grinder may be controlled to grind the test wafer with the set grinding parameter. A first total thickness variation of the grinded test wafer is acquired by a dedicated measurement device, and an updated grinding parameter is acquired based on the first total thickness variation. The grinder is controlled to grind the mass production wafer with the updated grinding parameter. In this way, a wafer with a uniform thickness can be obtained, thereby improving flatness of the grinded wafer.
Public/Granted literature
- US20210035872A1 Grinding Control Method And Device For Wafer, And Grinding Device Public/Granted day:2021-02-04
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