Invention Grant
- Patent Title: Semiconductor storage device
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Application No.: US17199601Application Date: 2021-03-12
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Publication No.: US11587850B2Publication Date: 2023-02-21
- Inventor: Nozomi Karyu , Genki Kawaguchi
- Applicant: Kioxia Corporation
- Applicant Address: JP Tokyo
- Assignee: Kioxia Corporation
- Current Assignee: Kioxia Corporation
- Current Assignee Address: JP Tokyo
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JPJP2020-153866 20200914
- Main IPC: H01L23/48
- IPC: H01L23/48 ; H01L27/11582 ; H01L27/11565 ; H01L27/11575 ; H01L27/1157 ; H01L27/11524 ; H01L27/11556

Abstract:
According to one embodiment, a semiconductor storage device includes: first and second plate-shaped portions which extend in a stacking direction of each layer of a first stacked body and a first direction intersecting the stacking direction and are arranged between the first stacked body and a second stacked body on both sides of the second stacked body in a second direction intersecting the stacking direction and the first direction; and an isolation layer that penetrates at least the uppermost conductive layer among a plurality of conductive layers and isolates the uppermost conductive layer in the second direction. The isolation layer extends in a portion of the first stacked body in the first direction toward the second stacked body, and is connected to a side surface of the first plate-shaped portion from a first region on an inner side of the first and second plate-shaped portions.
Public/Granted literature
- US20220084910A1 SEMICONDUCTOR STORAGE DEVICE Public/Granted day:2022-03-17
Information query
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