Invention Grant
- Patent Title: Distribution layer structure and manufacturing method thereof, and bond pad structure
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Application No.: US17109783Application Date: 2020-12-02
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Publication No.: US11587893B2Publication Date: 2023-02-21
- Inventor: Ping-Heng Wu , Chieh-Ting Hsu
- Applicant: Changxin Memory Technologies, Inc.
- Applicant Address: CN Anhui
- Assignee: Changxin Memory Technologies, Inc.
- Current Assignee: Changxin Memory Technologies, Inc.
- Current Assignee Address: CN Anhui
- Agency: Sheppard Mullin Richter & Hampton LLP
- Priority: CN201811391850.3 20181121,CN201821922748.7 20181121
- Main IPC: H01L23/00
- IPC: H01L23/00

Abstract:
A distribution layer structure and a manufacturing method thereof, and a bond pad structure are provided. The distribution layer structure includes a dielectric layer and a wire layer embedded in the dielectric layer. The wire layer includes a frame and a connection line, the frame has at least two openings and is divided into a plurality of segments by the at least two openings. The connection line is located in the frame and has a plurality of connecting ends connected to the frame. The connection line divides an interior of the frame into a plurality of areas, with each segment connected to one of the connecting ends, and each area connected to one of the openings. This structure provides improved binding force between the wire layer and the dielectric layer without increasing a resistance of a wire connecting with a top bond pad.
Public/Granted literature
- US20210091019A1 DISTRIBUTION LAYER STRUCTURE AND MANUFACTURING METHOD THEREOF, AND BOND PAD STRUCTURE Public/Granted day:2021-03-25
Information query
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