Invention Grant
- Patent Title: Particle detector, particle detection apparatus, and particle detection method
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Application No.: US17463282Application Date: 2021-08-31
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Publication No.: US11588092B2Publication Date: 2023-02-21
- Inventor: Takeshi Yamane
- Applicant: Kioxia Corporation
- Applicant Address: JP Tokyo
- Assignee: Kioxia Corporation
- Current Assignee: Kioxia Corporation
- Current Assignee Address: JP Tokyo
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, LLP
- Priority: JPJP2020-147065 20200901
- Main IPC: H01L39/10
- IPC: H01L39/10 ; G01T1/29 ; H01L27/18

Abstract:
A particle detector according to one embodiment includes: superconductive lines, conductive lines, insulating films, a first detection circuit, and a second detection circuit. The superconductive lines extend in a first direction and are arranged in a second direction intersecting the first direction. The conductive lines extend in a third direction different from the first direction and are arranged in a fourth direction intersecting the third direction. The insulating films are each interposed at an intersection point between one of the superconductive lines and one of the conductive lines. The first detection circuit detects a voltage change occurring in the superconductive lines. The second detection circuit detects a current or a voltage generated in the conductive lines when the voltage change occurs.
Public/Granted literature
- US20220069191A1 PARTICLE DETECTOR, PARTICLE DETECTION APPARATUS, AND PARTICLE DETECTION METHOD Public/Granted day:2022-03-03
Information query
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