Invention Grant
- Patent Title: Methods and systems for aligning master oscillator power amplifier systems
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Application No.: US16165022Application Date: 2018-10-19
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Publication No.: US11588293B2Publication Date: 2023-02-21
- Inventor: Chun-Lin Louis Chang , Henry Tong Yee-Shian , Alan Tu , Han-Lung Chang , Tzung-Chi Fu , Bo-Tsun Liu , Li-Jui Chen , Po-Chung Cheng
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Haynes and Boone, LLP
- Main IPC: H01S3/10
- IPC: H01S3/10 ; H01S3/23 ; H01S3/04 ; H01S3/11 ; H01S3/223 ; H01S3/041 ; H01S3/00 ; H05G2/00 ; H01S3/104

Abstract:
The present disclosure provides a method for aligning a master oscillator power amplifier (MOPA) system. The method includes ramping up a pumping power input into a laser amplifier chain of the MOPA system until the pumping power input reaches an operational pumping power input level; adjusting a seed laser power output of a seed laser of the MOPA system until the seed laser power output is at a first level below an operational seed laser power output level; and performing a first optical alignment process to the MOPA system while the pumping power input is at the operational pumping power input level, the seed laser power output is at the first level, and the MOPA system reaches a steady operational thermal state.
Public/Granted literature
- US20190157828A1 Methods and Systems for Aligning Master Oscillator Power Amplifier Systems Public/Granted day:2019-05-23
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