Invention Grant
- Patent Title: Acoustic wave device
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Application No.: US16801364Application Date: 2020-02-26
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Publication No.: US11588462B2Publication Date: 2023-02-21
- Inventor: Yasunobu Hayashi
- Applicant: Murata Manufacturing Co., Ltd.
- Applicant Address: JP Nagaokakyo
- Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee Address: JP Nagaokakyo
- Agency: Keating & Bennett, LLP
- Priority: JP2019-040184 20190306
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H03H9/25 ; H03H9/13 ; H03H9/64

Abstract:
An acoustic wave device includes a piezoelectric layer and an interdigital transducer disposed on the piezoelectric layer. The interdigital transducer primarily includes Al and includes an additive selected from a group consisting of Nd, Sc, and Ta, and a concentration of the additive in a region opposite to a piezoelectric-layer-side region of the interdigital transducer is higher than a concentration of the additive in the piezoelectric-layer-side region of the interdigital transducer.
Public/Granted literature
- US20200287516A1 ACOUSTIC WAVE DEVICE Public/Granted day:2020-09-10
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