Invention Grant
- Patent Title: Surface acoustic wave devices with ultra-thin transducers
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Application No.: US17031781Application Date: 2020-09-24
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Publication No.: US11588463B2Publication Date: 2023-02-21
- Inventor: Zhuohui Chen
- Applicant: Zhuohui Chen
- Applicant Address: CA Ottawa
- Assignee: Zhuohui Chen
- Current Assignee: Zhuohui Chen
- Current Assignee Address: CA Ottawa
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H03H3/08 ; H03H9/145

Abstract:
A surface acoustic wave (SAW) device and methods of making the same are disclosed. The surface acoustic wave device includes a piezoelectric layer coupled to a high acoustic velocity layer at a first surface of the piezoelectric layer. At least one transducer is provided over a second surface of the piezoelectric layer. The at least one transducer comprises a plurality of IDT electrodes that are formed from a substantially two-dimensional (2D) conductive material and configured to propagate a surface acoustic wave having an operating wavelength along the piezoelectric layer.
Public/Granted literature
- US20220094327A1 SURFACE ACOUSTIC WAVE DEVICES WITH ULTRA-THIN TRANSDUCERS Public/Granted day:2022-03-24
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