Invention Grant
- Patent Title: Substrate treating apparatus and substrate transporting method
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Application No.: US17576325Application Date: 2022-01-14
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Publication No.: US11590540B2Publication Date: 2023-02-28
- Inventor: Joji Kuwahara , Koji Kaneyama
- Applicant: SCREEN Holdings Co., Ltd.
- Applicant Address: JP Kyoto
- Assignee: SCREEN Holdings Co., Ltd.
- Current Assignee: SCREEN Holdings Co., Ltd.
- Current Assignee Address: JP Kyoto
- Agency: Ostrolenk Faber LLP
- Priority: JPJP2018-248737 20181228
- Main IPC: H01L21/677
- IPC: H01L21/677 ; B08B3/04

Abstract:
A substrate treating apparatus and a substrate transporting method wherein a platform is disposed on a first ID block, and a platform is placed on a second ID block. A currently-used carrier platform is provided only on the first ID block. Accordingly, a substrate is transported in both a forward path and a return path between the first ID block and a second treating block. The substrate is returned not to the first ID block but to the second ID block disposed between the two treating blocks in the return path.
Public/Granted literature
- US20220134389A1 SUBSTRATE TREATING APPARATUS AND SUBSTRATE TRANSPORTING METHOD Public/Granted day:2022-05-05
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