- Patent Title: Particle collection device and mask cleaning device having the same
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Application No.: US16918013Application Date: 2020-07-01
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Publication No.: US11590542B2Publication Date: 2023-02-28
- Inventor: Yong-Hwan Ryu , Jiae Kim , Yunji Nam , Sun-Jin Song , In-Ja Han
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Agency: H.C. Park & Associates, PLC
- Priority: KR10-2019-0079635 20190702
- Main IPC: B08B3/14
- IPC: B08B3/14 ; B08B7/04 ; H01L21/67 ; C23C16/04 ; H01L27/32 ; H01L51/52
Abstract:
A particle collection device includes a collection sheet and a frame on which the collection sheet is mounted. The collection sheet includes a base sheet, a magnetic substance, and a metal protrusion disposed on the base sheet to be adjacent to the magnetic substance.
Public/Granted literature
- US20210001382A1 PARTICLE COLLECTION DEVICE AND MASK CLEANING DEVICE HAVING THE SAME Public/Granted day:2021-01-07
Information query
IPC分类:
