Invention Grant
- Patent Title: Method for operating a capacitive MEMS sensor, and capacitive MEMS sensor
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Application No.: US17296862Application Date: 2020-01-20
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Publication No.: US11591209B2Publication Date: 2023-02-28
- Inventor: Francesco Diazzi , Andrea Visconti , Luca Valli
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Norton Rose Fulbright US LLP
- Agent Gerard Messina
- Priority: DE102019202326.6 20190221
- International Application: PCT/EP2020/051225 WO 20200120
- International Announcement: WO2020/169283 WO 20200827
- Main IPC: G01C19/5776
- IPC: G01C19/5776 ; B81B3/00

Abstract:
A method for operating a capacitive MEMS sensor. The method includes: supplying a defined electrical potential on a deflectably mounted, seismic mass of the MEMS sensor; capacitively inducing a vibrational motion of the seismic mass with the aid of a clocked electrical control voltage; compensating for fluctuations in the supplied electrical potential on the seismic mass caused by the clocked electrical control voltage, by selectively charging and/or discharging an electrical storage element connected to the seismic mass in accordance with the frequency of the clocked electrical control voltage.
Public/Granted literature
- US20220024755A1 METHOD FOR OPERATING A CAPACITIVE MEMS SENSOR, AND CAPACITIVE MEMS SENSOR Public/Granted day:2022-01-27
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