Invention Grant
- Patent Title: Temperature detection device
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Application No.: US16823705Application Date: 2020-03-19
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Publication No.: US11592342B2Publication Date: 2023-02-28
- Inventor: Jae Won Lee , Ju Young Lee , Kyung Cheol Jeong , Jun Ho Lee , Yong Guk Park
- Applicant: KCTECH CO., LTD.
- Applicant Address: KR Gyeonggi-do
- Assignee: KCTECH CO., LTD.
- Current Assignee: KCTECH CO., LTD.
- Current Assignee Address: KR Gyeonggi-do
- Agency: KDB Firm PLLC
- Priority: KR10-2019-0033086 20190322
- Main IPC: G01K13/02
- IPC: G01K13/02 ; G01K1/14 ; G01K1/143
Abstract:
Disclosed is a temperature detection device. The device for detecting temperature of a processing liquid for substrate processing according to an embodiment includes a temperature measurement sensor installed adjacent to an outer surface of a tube through which the processing liquid flows, in which the temperature measurement sensor senses the temperature of the processing liquid in the tube.
Public/Granted literature
- US20200300716A1 TEMPERATURE DETECTION DEVICE Public/Granted day:2020-09-24
Information query
