Invention Grant
- Patent Title: Device and method for detecting particles and method for manufacturing same
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Application No.: US17247352Application Date: 2020-12-08
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Publication No.: US11592384B2Publication Date: 2023-02-28
- Inventor: Mathieu Dupoy , Laurent Frey , Serge Gidon
- Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Applicant Address: FR Paris
- Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee Address: FR Paris
- Agency: BakerHostetler
- Priority: FR1914428 20191213
- Main IPC: G01N15/14
- IPC: G01N15/14 ; G01N15/00

Abstract:
A device for detecting (D) at least one predetermined particle (P) includes an interferometric element (EI) arranged so as to be illuminated by an incident radiation (Lin) and comprising at least one so-called thin layer (CM) disposed on top of a so-called substrate layer (Sub), the particle being attached to a surface (Sm) of the thin layer, the interferometric element (EI) forming a Fabry-Pérot cavity with or without attached particle P; a matrix sensor (Det) adapted to detect an image comprising a first portion (P1) deriving from the detection of the incident radiation transmitted (LTBG) by the interferometric element alone and a second portion (P2) deriving from the detection of the incident radiation transmitted (LTP) by the interferometric element and any particle (O, P) attached to a surface (Sm) of the thin layer; a processor (UT) linked to the sensor and configured: to calculate, as a function of wavelengths of the incident radiation λi i∈[1,m], the variation of intensity of at least one first pixel of the first portion, called first variation (FBG) and of at least one second pixel of the second portion, called second variation (FP), to determine a trend, as a function of the wavelengths of the incident radiation λi i∈[1,m], of a phase shift ϕi between the first variation and the second variation; to detect the attached particle when the phase shift ϕi is not constant as a function of the wavelengths of the incident radiation λi i∈[1,m].
Public/Granted literature
- US20210181083A1 DEVICE AND METHOD FOR DETECTING PARTICLES AND METHOD FOR MANUFACTURING SAME Public/Granted day:2021-06-17
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