Invention Grant
- Patent Title: MEMS dual substrate switch with magnetic actuation
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Application No.: US17200954Application Date: 2021-03-15
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Publication No.: US11594389B2Publication Date: 2023-02-28
- Inventor: Christopher S Gudeman , Marin Sigurdson
- Applicant: Innovative Micro Technology
- Applicant Address: US CA Goleta
- Assignee: Innovative Micro Technology
- Current Assignee: Innovative Micro Technology
- Current Assignee Address: US CA Goleta
- Agent Jaquelin K. Spong
- Main IPC: H01H50/00
- IPC: H01H50/00 ; H01H50/54 ; H01H49/00 ; H01H50/36 ; H01H50/64

Abstract:
Systems and methods for forming a magnetostatic MEMS switch include forming a movable beam on a first substrate, forming the electrical contacts on a second substrate, and coupling the two substrates using a hermetic seal. A shunt bar on the movable plate may close the switch when lowered onto the contacts. The switch may generally be closed, with the shunt bar resting on the contacts. However, a magnetically permeable material may also be inlaid into the movable plate. The switch may then be opened by placing either a permanent magnet or an electromagnet in proximity to the switch.
Public/Granted literature
- US20210202196A1 MEMS DUAL SUBSTRATE SWITCH WITH MAGNETIC ACTUATION Public/Granted day:2021-07-01
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