Invention Grant
- Patent Title: X-ray tube, x-ray analysis apparatus, and method of cooling target in x-ray tube
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Application No.: US17169956Application Date: 2021-02-08
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Publication No.: US11594393B2Publication Date: 2023-02-28
- Inventor: Masaaki Yamakata
- Applicant: Rigaku Corporation
- Applicant Address: JP Akishima
- Assignee: Rigaku Corporation
- Current Assignee: Rigaku Corporation
- Current Assignee Address: JP Akishima
- Agency: Cantor Colburn LLP
- Priority: JPJP2020-020085 20200207
- Main IPC: H01J35/12
- IPC: H01J35/12

Abstract:
Provided is an X-ray tube, including: an electron-beam emitting unit; a target having a first surface and a second surface; a solid heat diffusion member fixed onto the second surface of the target; and a flow-path forming member, which is arranged on a side of the solid heat diffusion member, the side being opposite to the target, and that is configured to define a film flow path in which a cooling fluid forms a film flow that is parallel to a surface shape of the solid heat diffusion member. A protruding portion protrudes toward the side of the solid heat diffusion member, which is opposite to the target. The film flow path has a shape extending along at least a part of a surface of the protruding portion.
Public/Granted literature
- US20210249214A1 X-RAY TUBE, X-RAY ANALYSIS APPARATUS, AND METHOD OF COOLING TARGET IN X-RAY TUBE Public/Granted day:2021-08-12
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