Invention Grant
- Patent Title: Modular recipe controlled calibration (MRCC) apparatus used to balance plasma in multiple station system
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Application No.: US17204876Application Date: 2021-03-17
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Publication No.: US11594397B2Publication Date: 2023-02-28
- Inventor: Eller Y. Juco , Karl Frederick Leeser , David French , Sunil Kapoor , Aaron Bingham , David Alan Metz , Brett Herzig , Jacob L. Hiester , Brian Knight
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Penilla IP, APC
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H01L21/687

Abstract:
A circuit tuning radio frequency (RF) power. The circuit includes a low to mid frequency (LF/HF) tuning circuit including a variable LF/MF capacitor coupled in series with an LF/MF inductor. The LF/MF tuning circuit is coupled between ground and a common node configured to receive an RF input. The circuit includes a high frequency (HF) tuning circuit coupled in parallel to the LF/MF tuning circuit between ground and the common node. The HF tuning circuit includes a variable HF capacitor coupled in series with an HF inductor. Cross parallel isolation occurs between the LF/MF inductor of the LF/MF tuning circuit and the HF inductor of the HF tuning circuit when adjusting the variable LF/MF capacitor or variable HF capacitor.
Public/Granted literature
- US20210202208A1 MODULAR RECIPE CONTROLLED CALIBRATION (MRCC) APPARATUS USED TO BALANCE PLASMA IN MULTIPLE STATION SYSTEM Public/Granted day:2021-07-01
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