Invention Grant
- Patent Title: Reticle pod having side containment of reticle
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Application No.: US17089987Application Date: 2020-11-05
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Publication No.: US11594437B2Publication Date: 2023-02-28
- Inventor: Russ V. Raschke , Shawn D. Eggum , Barry L. Gregeron
- Applicant: ENTEGRIS, INC.
- Applicant Address: US MA Billerica
- Assignee: ENTEGRIS, INC.
- Current Assignee: ENTEGRIS, INC.
- Current Assignee Address: US MA Billerica
- Main IPC: H01L21/673
- IPC: H01L21/673

Abstract:
A reticle pod includes an outer pod, an inner pod cover and an inner base plate. A reticle is supported on the base and is contained within the environment created by the inner pod cover and the inner pod base. The inner pod cover can include a plurality of reticle retainers configured to contact a side wall of the reticle and limit movement of the reticle in a horizontal direction.
Public/Granted literature
- US20210057248A1 RETICLE POD HAVING SIDE CONTAINMENT OF RETICLE Public/Granted day:2021-02-25
Information query
IPC分类: