Invention Grant
- Patent Title: Remanent polarizable capacitive structure, memory cell, and methods thereof
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Application No.: US17072888Application Date: 2020-10-16
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Publication No.: US11594542B2Publication Date: 2023-02-28
- Inventor: Patrick Polakowski
- Applicant: Ferroelectric Memory GmbH
- Applicant Address: DE Dresden
- Assignee: Ferroelectric Memory GmbH
- Current Assignee: Ferroelectric Memory GmbH
- Current Assignee Address: DE Dresden
- Agency: Hickman Becker Bingham Ledesma LLP
- Agent Malgorzata A Kulczycka
- Main IPC: H01L27/11507
- IPC: H01L27/11507 ; H01L29/78 ; H01L29/786 ; H01L29/423 ; H01L29/06 ; H01L49/02

Abstract:
According to various aspects, a method of forming one or more remanent-polarizable capacitive structures, the method including forming one or more capacitive structures, each of the one or more capacitive structures includes: one or more electrodes, one or more precursor structures disposed adjacent to the one or more electrodes, wherein each of the one or more precursor structures has a first dimension in a range from about 1 nm to 100 nm and a second dimension in a range from about 1 nm to about 30 nm; and, subsequently, forming one or more remanent-polarizable structures comprising a crystalline remanent-polarizable material based on a crystallization of a precursor material of the one or more precursor structures.
Public/Granted literature
- US20220122999A1 REMANENT POLARIZABLE CAPACITIVE STRUCTURE, MEMORY CELL, AND METHODS THEREOF Public/Granted day:2022-04-21
Information query
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