Invention Grant
- Patent Title: Three-dimensional ferroelectric memory device containing lattice-matched templates and methods of making the same
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Application No.: US17150561Application Date: 2021-01-15
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Publication No.: US11594553B2Publication Date: 2023-02-28
- Inventor: Rahul Sharangpani , Raghuveer S. Makala , Fei Zhou , Adarsh Rajashekhar
- Applicant: SANDISK TECHNOLOGIES LLC
- Applicant Address: US TX Addison
- Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee Address: US TX Addison
- Agency: The Marbury Law Law Group PLLC
- Main IPC: H01L27/11597
- IPC: H01L27/11597 ; H01L27/1159 ; H01L27/11587 ; H01L27/11563 ; H01L27/11578 ; H01L27/11582

Abstract:
A ferroelectric memory device includes an alternating stack of insulating layers and electrically conductive layers, a memory opening vertically extending through the alternating stack, and a memory opening fill structure located in the memory opening and containing a vertical stack of memory elements and a vertical semiconductor channel. Each memory element within the vertical stack of memory elements includes a crystalline ferroelectric memory material portion and an epitaxial template portion.
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