Invention Grant
- Patent Title: Wakeup-free ferroelectric memory device
-
Application No.: US17117711Application Date: 2020-12-10
-
Publication No.: US11594632B2Publication Date: 2023-02-28
- Inventor: Mickey Hsieh , Chun-Yang Tsai , Kuo-Ching Huang , Kuo-Chi Tu , Pili Huang , Cheng-Jun Wu , Chao-Yang Chen
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L27/11507 ; H01L49/02 ; H01L29/66 ; H01L29/51 ; H01L27/1159 ; H01L21/28

Abstract:
Various embodiments of the present disclosure are directed towards a ferroelectric memory device. The ferroelectric memory device includes a pair of source/drain regions disposed in a semiconductor substrate. A gate dielectric is disposed over the semiconductor substrate and between the source/drain regions. A first conductive structure is disposed on the gate dielectric. A ferroelectric structure is disposed on the first conductive structure. A second conductive structure is disposed on the ferroelectric structure, where both the first conductive structure and the second conductive structure have an overall electronegativity that is greater than or equal to an overall electronegativity of the ferroelectric structure.
Public/Granted literature
- US20210098630A1 WAKEUP-FREE FERROELECTRIC MEMORY DEVICE Public/Granted day:2021-04-01
Information query
IPC分类: