Invention Grant
- Patent Title: Semiconductor storage device with insulating films adjacent resistance changing films
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Application No.: US17010382Application Date: 2020-09-02
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Publication No.: US11594677B2Publication Date: 2023-02-28
- Inventor: Yusuke Kobayashi
- Applicant: KIOXIA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: KIOXIA CORPORATION
- Current Assignee: KIOXIA CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Foley & Lardner LLP
- Priority: JPJP2019-168160 20190917
- Main IPC: H01L45/00
- IPC: H01L45/00 ; G11C8/14 ; H01L27/24 ; G11C7/18 ; G11C13/00

Abstract:
A semiconductor storage device includes a first wiring, a second wiring, an insulating portion, and a resistance changing film. The first wiring extends in a first direction. The second wiring extends in a second direction intersecting the first direction, and is provided at a location different from that of the first wiring in a third direction intersecting the first direction and the second direction. The insulating portion is provided between the first wiring and the second wiring in the third direction. The resistance changing film is provided between the first wiring and the second wiring in the third direction, is adjacent to the insulating film from a first side and a second side which is opposite to the first side in the first direction, and the resistance changing film being smaller than the second wiring in the first direction.
Public/Granted literature
- US20210083184A1 SEMICONDUCTOR STORAGE DEVICE Public/Granted day:2021-03-18
Information query
IPC分类: