Invention Grant
- Patent Title: Film bulk acoustic resonator including recessed frame with scattering sides
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Application No.: US16877674Application Date: 2020-05-19
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Publication No.: US11595018B2Publication Date: 2023-02-28
- Inventor: Jiansong Liu , Yuhao Liu , Li Chen , Yiliu Wang , Benjamin Paul Abbott , Kwang Jae Shin , Chun Sing Lam
- Applicant: SKYWORKS GLOBAL PTE. LTD.
- Applicant Address: SG Singapore
- Assignee: SKYWORKS GLOBAL PTE. LTD.
- Current Assignee: SKYWORKS GLOBAL PTE. LTD.
- Current Assignee Address: SG Singapore
- Agency: Lando & Anastasi, LLP
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H03H9/17 ; H03H9/56 ; H03H9/00 ; H03H9/70 ; H04B1/40
Abstract:
A film bulk acoustic wave resonator (FBAR) comprises a recessed frame region including an undulating perimeter.
Public/Granted literature
- US20200373901A1 FILM BULK ACOUSTIC RESONATOR INCLUDING RECESSED FRAME WITH SCATTERING SIDES Public/Granted day:2020-11-26
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