Invention Grant
- Patent Title: Vibration element, manufacturing method of vibration element, physical quantity sensor, inertial measurement device, electronic apparatus, and vehicle
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Application No.: US17243632Application Date: 2021-04-29
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Publication No.: US11595026B2Publication Date: 2023-02-28
- Inventor: Seiichiro Ogura , Keiichi Yamaguchi , Masahiro Oshio , Takashi Yamazaki
- Applicant: Seiko Epson Corporation
- Applicant Address: JP Toyko
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP Toyko
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JPJP2018-009173 20180123
- Main IPC: G01C19/5607
- IPC: G01C19/5607 ; G01C19/5621 ; H03H9/21 ; H03H3/02 ; H03H9/05 ; H03H3/04 ; H03H9/10
Abstract:
A vibration element includes a base and a vibrating arm extending from the base. The vibrating arm includes an arm positioned between the base and a weight. A weight film is disposed on the weight. The weight has a first principal surface and a second principal surface in a front and back relationship with respect to a center plane of the arm. A center of gravity of the weight is located between the first principal surface and the center plane of the arm. A center of gravity of the weight film is located between the second principal surface and the center plane of the arm.
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