Invention Grant
- Patent Title: Rotating lamp for laser-sustained plasma illumination source
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Application No.: US17024565Application Date: 2020-09-17
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Publication No.: US11596048B2Publication Date: 2023-02-28
- Inventor: Ilya Bezel , Leonid Borisovich Zvedenuk , Andrey Evgenievich Stepanov , Maksim Alexandrovich Deminskii , Boris Vasilyevich Potapkin
- Applicant: KLA Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA Corporation
- Current Assignee: KLA Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Suiter Swantz pc llo
- Main IPC: H05H1/24
- IPC: H05H1/24 ; H01J37/32

Abstract:
A broadband light source is disclosed. The broadband light source includes a rotatable gas containment structure. The broadband light source includes a rotational drive system configured to rotate the rotatable gas containment structure about the horizontal axis of rotation of the rotatable gas containment structure. The broadband light source includes a pump source configured to generate pump illumination and a reflector element configured to direct a portion of the pump illumination into the gas to sustain a plasma. The reflector is configured to collect a portion of broadband light emitted from the plasma.
Public/Granted literature
- US20210092826A1 ROTATING LAMP FOR LASER-SUSTAINED PLASMA ILLUMINATION SOURCE Public/Granted day:2021-03-25
Information query
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