Invention Grant

Coating apparatus
Abstract:
A coating apparatus includes a dispenser that includes a discharge port and a displacement sensor, the discharge port being configured to be capable of discharging liquid from a vertical direction the displacement sensor being configured to detect a distance in the vertical direction between the discharge port and the coating region, a drive device that drives the dispenser, a dispenser movement control unit that controls the drive device to move the dispenser along a predetermined coating path, a tilt detection unit that detects a tilt of the coating surface with respect to a reference plane based on the distance detected by the displacement sensor, and a coating path correction unit that corrects the coating path based on the tilt of the coating surface detected by the tilt detection unit.
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