Invention Grant
- Patent Title: Double-shaft shielding device and thin-film-deposition equipment with the same
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Application No.: US17497489Application Date: 2021-10-08
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Publication No.: US11596973B2Publication Date: 2023-03-07
- Inventor: Jing-Cheng Lin , Yu-Te Shen
- Applicant: SKY TECH INC.
- Applicant Address: TW Hsinchu County
- Assignee: SKY TECH INC.
- Current Assignee: SKY TECH INC.
- Current Assignee Address: TW Hsinchu County
- Agency: HDLS IPR Services
- Agent Chun-Ming Shih
- Priority: TW110123819 20210629
- Main IPC: B05C21/00
- IPC: B05C21/00 ; B05D1/32

Abstract:
The present disclosure provides a thin-film-deposition equipment with double-shaft shielding device, which includes a reaction chamber, a carrier and a double-shaft shielding device. The double-shaft shielding device includes a first-connecting arm, a second-connecting arm, a first-shield member, a second-shield member, a first driver and a second driver. The first driver is connected to the first-shield member via the first-connecting arm, and the second driver is connected to the second-shield member via the second-connecting arm, for respectively driving and swinging the two shield members to move in opposite directions via the two connecting arms. Thereby, during a cleaning process of the thin-film-deposition equipment, the two drivers swing the two shield members toward each other into a shielding state for covering the carrier, such that to effectively prevent removed pollutants from polluting the carrier during.
Public/Granted literature
- US20220410202A1 DOUBLE-SHAFT SHIELDING DEVICE AND THIN-FILM-DEPOSITION EQUIPMENT WITH THE SAME Public/Granted day:2022-12-29
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