Invention Grant
- Patent Title: Laser processing apparatus
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Application No.: US15919977Application Date: 2018-03-13
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Publication No.: US11597040B2Publication Date: 2023-03-07
- Inventor: Hiroshi Morikazu , Noboru Takeda
- Applicant: DISCO CORPORATION
- Applicant Address: JP Tokyo
- Assignee: DISCO CORPORATION
- Current Assignee: DISCO CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Greer, Burns & Crain, Ltd.
- Priority: JPJP2017-047591 20170313
- Main IPC: H01L21/683
- IPC: H01L21/683 ; H01L21/268 ; B23K26/53 ; B23K26/0622 ; B23K26/06 ; B23K26/08 ; H01L21/67 ; H01L21/68 ; B23K101/40 ; H01L21/78

Abstract:
A laser beam irradiation unit of a laser processing apparatus includes: a laser oscillator in which a repetition frequency is set so as to oscillate a pulsed laser having a pulse width shorter than a time of electronic excitation caused by irradiating the workpiece with a laser beam and oscillate at least two pulsed lasers within the electronic excitation time; a condenser that irradiates the workpiece held on the chuck table with the pulsed laser beams oscillated by the laser oscillator; and a thinning-out unit that is disposed between the laser oscillator and the condenser and guides the pulsed laser beams necessary for processing to the condenser by thinning out and discarding pulsed laser beams in a predetermined cycle.
Public/Granted literature
- US20180257171A1 LASER PROCESSING APPARATUS Public/Granted day:2018-09-13
Information query
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