- Patent Title: Method of forming pattern of cured product as well as production methods for processed substrate, optical component, circuit board, electronic component, imprint mold and imprint pretreatment coating material
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Application No.: US16150939Application Date: 2018-10-03
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Publication No.: US11597137B2Publication Date: 2023-03-07
- Inventor: Jun Kato , Takeshi Honma , Toshiki Ito , Hidetoshi Tsuzuki
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Venable LLP
- Main IPC: B29C59/16
- IPC: B29C59/16 ; G03F7/00 ; G03F7/16 ; B29C59/00 ; H01L21/02 ; H01L21/027 ; B82Y10/00 ; B82Y40/00 ; G03F7/027 ; B29K33/00
Abstract:
Provided is a method of producing a cured product pattern, including: a first step (arranging step) of arranging a layer formed of a curable composition (α1′) that is the components of the curable composition (α1) except the component (D) serving as a solvent on a substrate; and a second step (applying step) of applying droplets of a curable composition (α2) discretely onto the layer formed of the curable composition (α1), the curable composition (α1) having a number concentration of particles each having a particle diameter of 0.07 μm or more of less than 2,021 particles/mL, and the curable composition (α1′) having a surface tension larger than that of the curable composition (α2).
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