Invention Grant
- Patent Title: Apparatus, method, and recording medium storing command for controlling thin-film deposition process
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Application No.: US16381318Application Date: 2019-04-11
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Publication No.: US11597997B2Publication Date: 2023-03-07
- Inventor: Young Kyun Noh
- Applicant: IVWorks Co., Ltd.
- Applicant Address: KR Daejeon
- Assignee: IVWorks Co., Ltd.
- Current Assignee: IVWorks Co., Ltd.
- Current Assignee Address: KR Daejeon
- Agency: Foley & Lardner LLP
- Priority: KR10-2018-0133542 20181102
- Main IPC: C23C14/54
- IPC: C23C14/54 ; C23C16/52 ; G01N23/20058

Abstract:
The present disclosure discloses an apparatus. The apparatus according to the present disclosure may include a communication interface, one or more memories, and one or more processors. The one or more processors may be configured to: control the thin-film deposition devices to execute the thin-film deposition process by accessing the memory and executing a recipe; obtain in-process thin-film state data of the thin film from the thin-film measurement result received via the communication interface during the thin-film deposition process; and derive post-process thin-film state data of the thin film from the process condition data, the sensing data, and the in-process thin-film state data using a first correlation model.
Information query
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