Invention Grant
- Patent Title: Dual wafer plating fixture for a continuous plating line
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Application No.: US16295995Application Date: 2019-03-07
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Publication No.: US11598018B2Publication Date: 2023-03-07
- Inventor: Hung-Ming Wang , Paul W. Loscutoff , Raphael M. Manalo , Arnold V. Castillo , Mohamad Ridzwan Mustafa , Mark A. Kleshock , Neil G. Bergstrom
- Applicant: SunPower Corporation
- Applicant Address: US CA San Jose
- Assignee: SunPower Corporation
- Current Assignee: SunPower Corporation
- Current Assignee Address: US CA San Jose
- Agency: Schwabe, Williamson & Wyatt, P.C.
- Main IPC: C25D17/08
- IPC: C25D17/08 ; C25D7/12 ; C25D17/00 ; H01L31/05

Abstract:
A wafer plating fixture for use in simultaneously electroplating a two substrates. The wafer plating fixture including: an electrically conductive carrier bus; a plurality of contact clips electrically coupled to the carrier bus and configured to hold the two substrates in place and electrically couple the two substrates to the carrier bus; and a non-conductive substrate backer to separate the two substrates coupled to the carrier bus. A method of electroplating a plurality of substrates. The method including: mounting two substrates to be plated onto a wafer plating fixture; mounting the wafer plating fixture on a continuous belt of plating system; dipping the wafer plating fixture with the two substrates held thereon into an electroplating bath; and applying a voltage to the two substrates via the wafer plating fixture.
Public/Granted literature
- US20190301047A1 DUAL WAFER PLATING FIXTURE FOR A CONTINUOUS PLATING LINE Public/Granted day:2019-10-03
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