- Patent Title: Cooling apparatus having multiple evaporators for cooling objects having different amounts of heat generation, exposure apparatus including cooling apparatus, and industrial apparatus including cooling apparatus
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Application No.: US17102937Application Date: 2020-11-24
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Publication No.: US11598565B2Publication Date: 2023-03-07
- Inventor: Hitoshi Ishihama , Masakazu Nagata , Yuusuke Suzuki
- Applicant: CANON SEMICONDUCTOR EQUIPMENT INC.
- Applicant Address: JP Ibaraki
- Assignee: CANON SEMICONDUCTOR EQUIPMENT INC.
- Current Assignee: CANON SEMICONDUCTOR EQUIPMENT INC.
- Current Assignee Address: JP Ibaraki
- Agency: Wenderoth, Lind & Ponack, L.L.P.
- Priority: JPJP2018-101541 20180528
- Main IPC: F25B5/04
- IPC: F25B5/04 ; F25B39/00 ; F25B49/02 ; F25B41/20 ; F25B41/40 ; F25B7/00

Abstract:
A cooling apparatus includes a compressor, a first flow path and a second flow path branched from a branch point, a condenser disposed downstream of the branch point in the first flow path, a first decompressor disposed downstream of the condenser, a plurality of evaporators disposed downstream of the first decompressor and connected in series, a second decompressor disposed downstream of the branch point in the second flow path, a detection unit, and a control unit. The second flow path includes a hot-gas flow path configured to connect an outlet of the second decompressor and a meeting point with the first flow path. The control unit controls a degree of opening of the second decompressor depending on the temperature detected by the first temperature-detection unit and controls a degree of opening of the first decompressor depending on the temperature and/or the pressure detected by the detection unit.
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