- Patent Title: Method of examining a sample using a charged particle microscope
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Application No.: US16941253Application Date: 2020-07-28
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Publication No.: US11598733B2Publication Date: 2023-03-07
- Inventor: Tomas Tûma , Jan Klusá{hacek over (c)}ek , Jiri Petrek
- Applicant: FEI Company
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Main IPC: G01N23/22
- IPC: G01N23/22 ; G01N23/2206 ; G01N23/203 ; G01N23/2252

Abstract:
The invention relates to a method of examining a sample using a charged particle microscope, comprising the steps of providing a charged particle beam, as well as a sample; scanning said charged particle beam over said sample; and detecting, using a first detector, emissions of a first type from the sample in response to the beam scanned over the sample. Spectral information of detected emissions of the first type is used for assigning a plurality of mutually different phases to said sample. In a further step, a corresponding plurality of different color hues—with reference to an HSV color space—are associated to said plurality of mutually different phases. Using a second detector, emissions of a second type from the sample in response to the beam scanned over the sample are detected. Finally an image representation of said sample is provided.
Public/Granted literature
- US20210033548A1 METHOD OF EXAMINING A SAMPLE USING A CHARGED PARTICLE MICROSCOPE Public/Granted day:2021-02-04
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