Invention Grant
- Patent Title: Sensor
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Application No.: US17187702Application Date: 2021-02-26
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Publication No.: US11598744B2Publication Date: 2023-03-07
- Inventor: Hiroaki Yamazaki
- Applicant: KABUSHIKI KAISHA TOSHIBA
- Applicant Address: JP Tokyo
- Assignee: KABUSHIKI KAISHA TOSHIBA
- Current Assignee: KABUSHIKI KAISHA TOSHIBA
- Current Assignee Address: JP Tokyo
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, LLP
- Priority: JPJP2020-155480 20200916
- Main IPC: G01N33/00
- IPC: G01N33/00 ; G01N27/22

Abstract:
According to one embodiment, a sensor includes a sensor part and a first circuit. The sensor part includes a base body, a fixed electrode fixed to the base body, a supporter fixed to the base body, and a movable part supported by the supporter. The movable part includes a movable region including a movable electrode facing the fixed electrode, and a first support region provided between the movable region and the supporter. The first support region includes a first electrode, and a second electrode insulated from the first electrode. The first circuit is configured to perform a first operation of applying a voltage between the first electrode and the second electrode.
Public/Granted literature
- US20220082522A1 SENSOR Public/Granted day:2022-03-17
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