Invention Grant
- Patent Title: Gas sensor
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Application No.: US16592984Application Date: 2019-10-04
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Publication No.: US11598746B2Publication Date: 2023-03-07
- Inventor: Yumi Hayashi , Akihiro Kojima , Hiroaki Yamazaki
- Applicant: Kabushiki Kaisha Toshiba
- Applicant Address: JP Minato-ku
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JPJP2019-050180 20190318
- Main IPC: G01N27/407
- IPC: G01N27/407 ; H01L23/532 ; G01N27/22
Abstract:
In one embodiment, a gas sensor includes a sensing layer having a first region containing PdCuSi, and a second region which is provided outside the first region and contains PdCu.
Public/Granted literature
- US20200300803A1 GAS SENSOR Public/Granted day:2020-09-24
Information query
