Invention Grant
- Patent Title: Measuring method for measuring heat distribution of specific space using SThM probe, method and device for detecting beam spot of light source
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Application No.: US17335094Application Date: 2021-06-01
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Publication No.: US11598788B2Publication Date: 2023-03-07
- Inventor: Sang-il Park , Byoung-Woon Ahn , Ahjin Jo , Soobong Choi
- Applicant: PARK SYSTEMS CORP.
- Applicant Address: KR Suwon-si
- Assignee: PARK SYSTEMS CORP.
- Current Assignee: PARK SYSTEMS CORP.
- Current Assignee Address: KR Suwon-si
- Agency: Invenstone Patent, LLC
- Priority: KR10-2020-0066191 20200602
- Main IPC: G01Q60/58
- IPC: G01Q60/58 ; G01K3/00 ; G01K13/00

Abstract:
The present disclosure provides a measuring method for measuring heat distribution of a specific space using an SThM probe, and a method and device for detecting a beam spot of a light source.
The method according to an embodiment of the present disclosure is the measuring method for measuring heat distribution of a specific space, the measuring method includes: linearly moving a SThM probe that may measure a temperature change in the specific space; and calculating heat distribution of the specific space using continuous temperature change values obtained from the SThM probe during the moving step.
According to the measuring method, and the method and device for detecting a beam spot of a light source, it is possible to map temperature distribution in a small space using a SThM probe and it is possible to accurately detect a beam spot using the temperature distribution.
The method according to an embodiment of the present disclosure is the measuring method for measuring heat distribution of a specific space, the measuring method includes: linearly moving a SThM probe that may measure a temperature change in the specific space; and calculating heat distribution of the specific space using continuous temperature change values obtained from the SThM probe during the moving step.
According to the measuring method, and the method and device for detecting a beam spot of a light source, it is possible to map temperature distribution in a small space using a SThM probe and it is possible to accurately detect a beam spot using the temperature distribution.
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