Invention Grant
- Patent Title: Probe systems configured to test a device under test and methods of operating the probe systems
-
Application No.: US17506081Application Date: 2021-10-20
-
Publication No.: US11598789B2Publication Date: 2023-03-07
- Inventor: Martin Schindler , Stefan Kreissig , Torsten Kiel
- Applicant: FormFactor, Inc.
- Applicant Address: US CA Livermore
- Assignee: FormFactor, Inc.
- Current Assignee: FormFactor, Inc.
- Current Assignee Address: US CA Livermore
- Agency: Kolitch Romano Dascenzo Gates LLC
- Main IPC: G01R1/067
- IPC: G01R1/067 ; G01R31/00 ; G01R1/073

Abstract:
Probe systems configured to test a device under test and methods of operating the probe systems are disclosed herein. The probe systems include an electromagnetically shielded enclosure, which defines an enclosed volume, and a temperature-controlled chuck, which defines a support surface configured to support a substrate that includes the DUT. The probe systems also include a probe assembly and an optical microscope. The probe systems further include an electromagnet and an electronically controlled positioning assembly. The electronically controlled positioning assembly includes a two-dimensional positioning stage, which is configured to selectively position a positioned assembly along a first two-dimensional positioning axis and also along a second two-dimensional positioning axis. The electronically controlled positioning assembly also includes a first one-dimensional positioning stage that operatively attaches the optical microscope to the positioned assembly and a second one-dimensional positioning stage that operatively attaches the electromagnet to the positioning assembly.
Public/Granted literature
- US20220236303A1 PROBE SYSTEMS CONFIGURED TO TEST A DEVICE UNDER TEST AND METHODS OF OPERATING THE PROBE SYSTEMS Public/Granted day:2022-07-28
Information query