Invention Grant
- Patent Title: Ultra-broadband silicon waveguide micro-electro-mechanical systems (MEMS) photonic switch
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Application No.: US17258750Application Date: 2020-02-24
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Publication No.: US11598921B2Publication Date: 2023-03-07
- Inventor: Daoxin Dai , Yi Sun
- Applicant: ZHEJIANG UNIVERSITY
- Applicant Address: CN Zhejiang
- Assignee: ZHEJIANG UNIVERSITY
- Current Assignee: ZHEJIANG UNIVERSITY
- Current Assignee Address: CN Zhejiang
- Agency: JCIP Global Inc.
- Priority: CN201910949968.1 20191008
- International Application: PCT/CN2020/076340 WO 20200224
- International Announcement: WO2021/068447 WO 20210415
- Main IPC: G02B6/35
- IPC: G02B6/35

Abstract:
An ultra-broadband silicon waveguide micro-electro-mechanical systems (MEMS) photonic switch is provided, which is mainly composed of three parts: input waveguides, a waveguide crossing with a nano-gap, and output waveguides. The waveguide crossing is composed of two identical orthogonal elliptical cylinders. Four ports of the waveguide crossing respectively extend to form single-mode strip waveguides to serve as input/output waveguides. The center of the waveguide crossing is fully etched with a nano-gap. The two symmetrical port waveguides are fully etched with nano-grooves. The lower cladding near the waveguide crossing and the nano-grooves is penetrated and etched. The width of the nano-gap is adjusted through adjusting a voltage applied across both ends of the waveguide crossing, so that a guided-mode directly passes through or is totally reflected. In the disclosure, a propagation path of the photonic switch is switched through adjusting the voltage applied to the waveguide crossing.
Public/Granted literature
- US20220269007A1 ULTRA-BROADBAND SILICON WAVEGUIDE MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS) PHOTONIC SWITCH Public/Granted day:2022-08-25
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