Invention Grant
- Patent Title: Devices for thermally actuating deformable mirror, and associated manufacturing methods
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Application No.: US17101783Application Date: 2020-11-23
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Publication No.: US11598953B2Publication Date: 2023-03-07
- Inventor: Rüdiger Von Elm
- Applicant: Coherent LaserSystems GmbH & Co. KG
- Applicant Address: DE Göttingen
- Assignee: Coherent LaserSystems GmbH & Co. KG
- Current Assignee: Coherent LaserSystems GmbH & Co. KG
- Current Assignee Address: DE Göttingen
- Agency: Morrison & Foerster LLP
- Main IPC: G02B27/00
- IPC: G02B27/00 ; F03G7/06 ; G02B7/182 ; G02B26/08

Abstract:
A device for thermally actuating a deformable mirror includes a monolithic block that includes a mirror plate having a front face forming or configured to support a mirror, a base, and a one-dimensional array of thermally expandable actuators. The thermally expandable actuators mechanically connect a rear face of the mirror plate to the base such that shape, tilt, and/or location of the front face depend on temperature of the thermally expandable actuators. The mirror plate, base, and thermally expandable actuators are defined by slits that span between opposite-facing top and bottom surfaces of the monolithic block. The monolithic block may be made of a metal and may be manufactured at relatively low cost by wire eroding the slits in a metal block, using a wire that passes through the metal block between its top and bottom surfaces.
Public/Granted literature
- US20220163795A1 DEVICES FOR THERMALLY ACTUATING DEFORMABLE MIRROR, AND ASSOCIATED MANUFACTURING METHODS Public/Granted day:2022-05-26
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