Invention Grant
- Patent Title: Resin material for forming underlayer film, resist underlayer film, method of producing resist underlayer film, and laminate
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Application No.: US16753184Application Date: 2018-05-30
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Publication No.: US11599025B2Publication Date: 2023-03-07
- Inventor: Keisuke Kawashima , Takashi Oda , Koji Inoue
- Applicant: MITSUI CHEMICALS, INC.
- Applicant Address: JP Tokyo
- Assignee: MITSUI CHEMICALS, INC.
- Current Assignee: MITSUI CHEMICALS, INC.
- Current Assignee Address: JP Tokyo
- Agency: Buchanan, Ingersoll & Rooney PC
- Priority: JPJP2017-196452 20171006
- International Application: PCT/JP2018/020785 WO 20180530
- International Announcement: WO2019/069502 WO 20190411
- Main IPC: G03F7/22
- IPC: G03F7/22 ; C08F232/08 ; G03F7/11

Abstract:
Provided is a resin material for forming an underlayer film which is used to form a resist underlayer film used in a multi-layer resist process, the resin material including a cyclic olefin polymer (I), in which a temperature at an intersection between a storage modulus (G′) curve and a loss modulus (G″) curve in a solid viscoelasticity of the resin material for forming an underlayer film which is as measured under conditions of a measurement temperature range of 30° C. to 300° C., a heating rate of 3° C./min, and a frequency of 1 Hz in a nitrogen atmosphere in a shear mode using a rheometer is higher than or equal to 40° C. and lower than or equal to 200°.
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