Invention Grant
- Patent Title: Wafer asset modeling using language processing methods
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Application No.: US16933972Application Date: 2020-07-20
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Publication No.: US11599690B2Publication Date: 2023-03-07
- Inventor: Elham Khabiri , Anuradha Bhamidipaty , Robert Jeffrey Baseman , Chandrasekhara K. Reddy , Srideepika Jayaraman
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Intelletek Law Group, PLLC
- Agent Gabriel Daniel, Esq.
- Main IPC: G06F30/20
- IPC: G06F30/20 ; G06F30/27 ; G06F40/40 ; G01N21/95 ; G06F111/10

Abstract:
A computing device includes a processor and a storage device. A wafer asset modeling module is stored in the storage device and is executed by the processor to configure the computing device to perform acts identifying and clustering a plurality of assets based on static properties of a wafer asset using a first module of the wafer asset modeling module. The clustered plurality of assets is determined based on dynamic properties of the wafer asset using a second module of the wafer asset modeling module. Event prediction is performed by converting a numeric data of the clustered plurality of assets to a natural language processing (NLP) domain by a third module of the wafer asset modeling module. One or more sequence-to-sequence methods are performed to predict a malfunction of a component of the wafer asset and/or an event based on past patterns. Prediction information is stored in the storage device.
Public/Granted literature
- US20220019710A1 WAFER ASSET MODELING USING LANGUAGE PROCESSING METHODS Public/Granted day:2022-01-20
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