Invention Grant
- Patent Title: Plasma processing apparatus, plasma processing method, and memory medium
-
Application No.: US17023675Application Date: 2020-09-17
-
Publication No.: US11600466B2Publication Date: 2023-03-07
- Inventor: Masaharu Tanabe , Kazunari Sekiya , Tadashi Inoue , Hiroshi Sasamoto , Tatsunori Sato , Nobuaki Tsuchiya , Atsushi Takeda
- Applicant: Canon Anelva Corporation
- Applicant Address: JP Kawasaki
- Assignee: Canon Anelva Corporation
- Current Assignee: Canon Anelva Corporation
- Current Assignee Address: JP Kawasaki
- Agency: Buchanan Ingersoll & Rooney PC
- Priority: WOPCT/JP2018/024146 20180626,WOPCT/JP2018/024147 20180626,WOPCT/JP2018/024148 20180626,WOPCT/JP2018/024149 20180626
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H05H1/46

Abstract:
A plasma processing apparatus includes an impedance matching circuit, a balun having a first unbalanced terminal connected to the impedance matching circuit, a grounded second unbalanced terminal, a first balanced terminal and a second balanced terminal, a grounded vacuum container, a first electrode electrically connected to the first balanced terminal, a second electrode electrically connected to the second balanced terminal, an adjustment reactance configured to affect a relationship between a first voltage applied to the first electrode and a second voltage applied to the second electrode, a high-frequency power supply configured to supply a high frequency between the first unbalanced terminal and the second unbalanced terminal via the impedance matching circuit, and a controller configured to control an impedance of the impedance matching circuit and a reactance of the adjustment reactance.
Public/Granted literature
- US11462391B2 Plasma processing apparatus, plasma processing method, and memory medium Public/Granted day:2022-10-04
Information query