Invention Grant
- Patent Title: Plasma processing apparatus
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Application No.: US16720156Application Date: 2019-12-19
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Publication No.: US11600469B2Publication Date: 2023-03-07
- Inventor: Atsushi Takeda , Takayuki Moriwaki , Tadashi Inoue , Masaharu Tanabe , Kazunari Sekiya , Hiroshi Sasamoto , Tatsunori Sato , Nobuaki Tsuchiya
- Applicant: Canon Anelva Corporation
- Applicant Address: JP Kawasaki
- Assignee: Canon Anelva Corporation
- Current Assignee: Canon Anelva Corporation
- Current Assignee Address: JP Kawasaki
- Agency: Buchanan Ingersoll & Rooney PC
- Priority: WOPCT/JP2017/023603 20170627,WOPCT/JP2017/023611 20170627,JPJP2018-017548 20180202
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H01J37/18

Abstract:
A plasma processing apparatus includes a balun having a first unbalanced terminal, a second unbalanced terminal, a first balanced terminal, and a second balanced terminal, a grounded vacuum container, a first electrode electrically connected to the first balanced terminal, a second electrode electrically connected to the second balanced terminal, and a ground electrode arranged in the vacuum container and grounded.
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