Invention Grant
- Patent Title: Substrate support, plasma processing apparatus, and focus ring
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Application No.: US16677847Application Date: 2019-11-08
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Publication No.: US11600471B2Publication Date: 2023-03-07
- Inventor: Yasuharu Sasaki , Yohei Uchida
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Weihrouch IP
- Priority: JPJP2018-210733 20181108
- Main IPC: H01J37/32
- IPC: H01J37/32

Abstract:
A substrate support for a plasma processing apparatus includes a first support area configured to support a substrate placed thereon; a second support area configured to support a focus ring placed thereon, and extending in a circumferential direction outward in a radial direction with respect to the first support area; a conductive structure configured to be connected to the focus ring; and a holder configured to hold the connection member to press the connection member downward, and also to cause the connection member to press the surface of the focus ring. The conductive structure includes a first conductive path which provides a terminal area outward in the radial direction with respect to the second support area, and a connection member configured to electrically connect the focus ring and the terminal area, and disposed on the terminal area to face a surface of the focus ring.
Public/Granted literature
- US20200152428A1 SUBSTRATE SUPPORT, PLASMA PROCESSING APPARATUS, AND FOCUS RING Public/Granted day:2020-05-14
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