Invention Grant
- Patent Title: Semiconductor device with redistribution layers formed utilizing dummy substrates
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Application No.: US16921522Application Date: 2020-07-06
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Publication No.: US11600582B2Publication Date: 2023-03-07
- Inventor: Jin Young Kim , Ji Young Chung , Doo Hyun Park , Choon Heung Lee
- Applicant: Amkor Technology Singapore Holding Pte. Ltd.
- Applicant Address: SG Singapore
- Assignee: Amkor Technology Singapore Holding Pte. Ltd.
- Current Assignee: Amkor Technology Singapore Holding Pte. Ltd.
- Current Assignee Address: SG Singapore
- Agency: McAndrews, Held & Malloy, Ltd.
- Priority: KR10-2014-0013332 20140205
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L21/56 ; H01L23/31 ; H01L23/538 ; H01L25/10 ; H01L21/683 ; H01L21/48

Abstract:
A semiconductor device with redistribution layers formed utilizing dummy substrates is disclosed and may include forming a first redistribution layer on a first dummy substrate, forming a second redistribution layer on a second dummy substrate, electrically connecting a semiconductor die to the first redistribution layer, electrically connecting the first redistribution layer to the second redistribution layer, and removing the dummy substrates. The first redistribution layer may be electrically connected to the second redistribution layer utilizing a conductive pillar. An encapsulant material may be formed between the first and second redistribution layers. Side portions of one of the first and second redistribution layers may be covered with encapsulant. A surface of the semiconductor die may be in contact with the second redistribution layer. The dummy substrates may be in panel form. One of the dummy substrates may be in panel form and the other in unit form.
Public/Granted literature
- US20200335461A1 SEMICONDUCTOR DEVICE WITH REDISTRIBUTION LAYERS FORMED UTILIZING DUMMY SUBSTRATES Public/Granted day:2020-10-22
Information query
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