Invention Grant
- Patent Title: Semiconductor structure and fabrication method thereof
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Application No.: US17034129Application Date: 2020-09-28
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Publication No.: US11600619B2Publication Date: 2023-03-07
- Inventor: Haiyang Zhang , Panpan Liu
- Applicant: Semiconductor Manufacturing International (Shanghai) Corporation , Semiconductor Manufacturing International (Beijing) Corporation
- Applicant Address: CN Shanghai; CN Beijing
- Assignee: Semiconductor Manufacturing International (Shanghai) Corporation,Semiconductor Manufacturing International (Beijing) Corporation
- Current Assignee: Semiconductor Manufacturing International (Shanghai) Corporation,Semiconductor Manufacturing International (Beijing) Corporation
- Current Assignee Address: CN Shanghai; CN Beijing
- Agency: Anova Law Group, PLLC
- Priority: CN201911012609.X 20191023
- Main IPC: H01L27/092
- IPC: H01L27/092 ; H01L21/8234 ; H01L29/78 ; H01L21/3213 ; H01L29/66 ; H01L21/321

Abstract:
A semiconductor structure and its fabrication method are provided in the present disclosure. The method includes providing a substrate, forming a plurality of fins on the substrate, and forming an isolation structure layer including a plurality of isolation structures on the substrate, each isolation structure being formed between adjacent fins. The method further includes forming a first opening by etching at least one isolation structure of the plurality of isolation structures and a portion of the substrate, and forming a power rail by filling the first opening with a conductive material, where a top surface of the power rail is lower than a top surface of the plurality of fins.
Public/Granted literature
- US20210125987A1 SEMICONDUCTOR STRUCTURE AND FABRICATION METHOD THEREOF Public/Granted day:2021-04-29
Information query
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