Invention Grant
- Patent Title: Semiconductor element and method of manufacturing semiconductor element
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Application No.: US17250374Application Date: 2019-07-12
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Publication No.: US11600646B2Publication Date: 2023-03-07
- Inventor: Susumu Tonegawa
- Applicant: SONY SEMICONDUCTOR SOLUTIONS CORPORATION
- Applicant Address: JP Atsugi
- Assignee: SONY SEMICONDUCTOR SOLUTIONS CORPORATION
- Current Assignee: SONY SEMICONDUCTOR SOLUTIONS CORPORATION
- Current Assignee Address: JP Atsugi
- Agency: Chip Law Group
- Priority: JPJP2018-138144 20180724
- International Application: PCT/JP2019/027633 WO 20190712
- International Announcement: WO2020/022098 WO 20200130
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H01L29/06 ; H01L29/10

Abstract:
Current concentration in a channel region is reduced in a case where diffusion occurs of impurities from an element isolation region. A semiconductor element includes the element isolation region formed on a semiconductor substrate, a source region, a drain region, a gate, and the channel region. The gate is arranged on a surface of the semiconductor substrate between the source region and the drain region with an insulating film interposed between the gate and the semiconductor substrate. The channel region is arranged directly below the gate and between the source region and the drain region and is arranged adjacent to the element isolation region, and has a shape in which a channel length that is a distance between the drain region and the source region is shortened in the vicinity of the element isolation region.
Public/Granted literature
- US20210327933A1 SEMICONDUCTOR ELEMENT AND METHOD OF MANUFACTURING SEMICONDUCTOR ELEMENT Public/Granted day:2021-10-21
Information query
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