- Patent Title: Semiconductor structure integrated with magnetic tunneling junction
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Application No.: US17343695Application Date: 2021-06-09
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Publication No.: US11600661B2Publication Date: 2023-03-07
- Inventor: Alexander Kalnitsky , Harry-Hak-Lay Chuang , Sheng-Haung Huang , Tien-Wei Chiang
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Current Assignee Address: TW Hsinchu
- Agency: WPAT Law
- Agent Anthony King
- Main IPC: H01L27/22
- IPC: H01L27/22 ; G01R33/09 ; G11B5/39 ; H01L43/08 ; H01L43/12

Abstract:
The present disclosure provides a semiconductor structure. The semiconductor structure includes a substrate, a transistor region, a metal interconnect, and a magnetic tunneling junction (MTJ). The transistor region includes a gate over the substrate, and a doped region is at least partially in the substrate. The metal interconnect is over the doped region. The metal interconnect includes a metal via. The MTJ is entirely underneath the metal interconnect and between the doped region and the metal via, and a diameter of a bottom surface of the MTJ is greater than a diameter of an upper surface of the MTJ.
Public/Granted literature
- US20210305317A1 SEMICONDUCTOR STRUCTURE INTEGRATED WITH MAGNETIC TUNNELING JUNCTION Public/Granted day:2021-09-30
Information query
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