Invention Grant
- Patent Title: Semiconductor device including trench electrode structures
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Application No.: US16991090Application Date: 2020-08-12
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Publication No.: US11600697B2Publication Date: 2023-03-07
- Inventor: Alim Karmous
- Applicant: Infineon Technologies Austria AG
- Applicant Address: AT Villach
- Assignee: Infineon Technologies Austria AG
- Current Assignee: Infineon Technologies Austria AG
- Current Assignee Address: AT Villach
- Agency: Murphy, Bilak & Homilier, PLLC
- Priority: DE102019122453.5 20190821
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L23/482 ; H01L29/423 ; H01L29/417 ; H01L29/40 ; H01L21/761 ; H01L21/762 ; H01L29/78 ; H01L29/739

Abstract:
A semiconductor device is proposed. The semiconductor device includes a semiconductor body including a first main surface. A plurality of trench electrode structures extend in parallel along a first lateral direction. A first one of the plurality of trench electrode structures includes a gate electrode. A gate contact is electrically connected to the gate electrode in a gate contact area. The gate contact area is arranged in a first section along the first lateral direction. An isolation structure is arranged between the gate contact and the semiconductor body in the gate contact area. A bottom side of the isolation structure is arranged between a bottom side of the first one of the plurality of trench electrode structures and the first main surface along a vertical direction. The gate contact extends up to or below the first main surface along the vertical direction.
Public/Granted literature
- US20210057523A1 Semiconductor Device Including Trench Electrode Structures Public/Granted day:2021-02-25
Information query
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