Invention Grant
- Patent Title: Semiconductor structure
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Application No.: US17648732Application Date: 2022-01-24
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Publication No.: US11600726B2Publication Date: 2023-03-07
- Inventor: Qinghua Han
- Applicant: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Applicant Address: CN Hefei
- Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Current Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Current Assignee Address: CN Hefei
- Agency: Cooper Legal Group, LLC
- Priority: CN202110746050.4 20210701
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/423 ; H01L27/108 ; H01L29/66

Abstract:
Embodiments of the present disclosure provide a semiconductor structure and a manufacturing method thereof. The semiconductor structure includes: a base; bit lines, located on the base, and a material of the bit line including a metal semiconductor compound; semiconductor channels, each including a first doped region, a channel region and a second doped region arranged in sequence, and the first doped region being in contact with the bit line; a first dielectric layer, covering sidewall surfaces of the first doped regions, and a first interval being provided between parts of the first dielectric layer covering sidewalls of adjacent first doped regions on a same bit line; an insulating layer, covering sidewall surfaces of the channel regions; word lines, covering a sidewall surface of the insulating layer away from the channel regions, and a second interval being provided between adjacent word lines.
Public/Granted literature
- US20230006061A1 SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF Public/Granted day:2023-01-05
Information query
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