Invention Grant
- Patent Title: Dynamic electrical and fluid delivery system with indexing motion for batch processing chambers
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Application No.: US17009652Application Date: 2020-09-01
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Publication No.: US11602064B2Publication Date: 2023-03-07
- Inventor: Akshay Gunaji , Uday Pai , Timothy J. Roggenbuck , Sanjeev Baluja , Kalesh Panchaxari Karadi , Tejas Ulavi
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Servilla Whitney LLC
- Main IPC: H05K5/02
- IPC: H05K5/02 ; C23C16/455 ; H02G3/04 ; C23C16/458
Abstract:
Process assemblies and cable management assemblies for managing cables in tight envelopes. A processing assembly includes a top chamber having at least one substrate support, a support shaft, a robot spindle assembly, a stator and a cable management system. The cable management system includes an inner trough assembly and an outer trough assembly configured to move relative to one another, and a plurality of chain links configured to house at least one cable for delivering power to the process assembly.
Public/Granted literature
- US20220071037A1 Dynamic Electrical and Fluid Delivery System with Indexing Motion for Batch Processing Chambers Public/Granted day:2022-03-03
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